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MKS Instruments, Inc.

90 Industrial Way
Wilmington, MA 01887-4610
Phone: 978-284-4000, 800-227-8766 (toll free)
Fax: 978-284-4999

Global manufacturer of instruments & components that power, measure, control & monitor complex vacuum & gas-related manufacturing processes in various industries, including semiconductor, thin-film coatings, flat panel display, biopharmaceutical, fuel cell, emissions monitoring, industrial automation & medical device manufacturing.

Website: http://www.mksinst.com